Other Dry Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
Content deleted Content added
No edit summary |
|||
| Line 8: | Line 8: | ||
=[[CAIBE (Oxford Ion Mill)]]= |
=[[CAIBE (Oxford Ion Mill)]]= |
||
*[[media:*[[media:|Pt Etch Recipe]]|Pt Etch Recipe]] |
|||
Revision as of 21:01, 22 July 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- [[media:*[[media:|Pt Etch Recipe]]|Pt Etch Recipe]]