Surface Analysis (KLA/Tencor Surfscan): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
No edit summary
Line 2: Line 2:
|picture=KLA.jpg
|picture=KLA.jpg
|type = Inspection, Test and Characterization
|type = Inspection, Test and Characterization
|super= Tom Reynolds
|super= Biljana Stamenic
|location=Bay 5
|location=Bay 5
|description = ?
|description = ?

Revision as of 21:49, 28 July 2015

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Tool Type Inspection, Test and Characterization
Location Bay 5
Supervisor Biljana Stamenic
Supervisor Phone (805) 893-4002
Supervisor E-Mail biljana@ece.ucsb.edu
Description ?
Manufacturer Tencor


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.

Documentation

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Surface_Analysis_(KLA/Tencor_Surfscan)&oldid=153759"