Other Dry Etching Recipes: Difference between revisions
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*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
*[[media:42-Etching_Platinum_using_Oxford_Ion_Mill_Tool-a.pdf|Pt Etch Recipe]] |
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*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Au Etch Recipe]] |
*[[media:44-Etching_Gold_with_Al2O3_Mask_using_Oxford_Ion_Mill_Tool.pdf|Au Etch Recipe]] |
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*[[media:|Ni Etch Recipe]] |
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Revision as of 23:25, 1 December 2015
Back to Dry Etching Recipes.
XeF2 Etch (Xetch)
Vapor HF Etch (uETCH)
CAIBE (Oxford Ion Mill)
- Pt Etch Recipe
- Au Etch Recipe
- [[media:|Ni Etch Recipe]]