Filmetrics F40-UV Microscope-Mounted: Difference between revisions
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The Filmetrics F40-UV is a microscope-mounted thin-film measurement system, allowing you to non-descructively measure thin-film thicknesses in small (patterned) areas on your sample. It is an optical reflectometer, acquiring reflection spectra between 400-900nm optical wavelengths (Vis to Near-IR) with a regular halogen microscope light source. The Filmetrics software then performs curve-fitting to determine the thickness and/or refractive index of the measured films. |
The Filmetrics F40-UV is a microscope-mounted thin-film measurement system, allowing you to non-descructively measure thin-film thicknesses in small (patterned) areas on your sample. It is an optical reflectometer, acquiring reflection spectra between 400-900nm optical wavelengths (Vis to Near-IR) with a regular halogen microscope light source. The Filmetrics software then performs curve-fitting to determine the thickness and/or refractive index of the measured films. |
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== Capabilities == |
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It is equipped with 10x, 20x, 50x, 100x and 150x objectives. |
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* Measure optically transparent thin-films down to ~30nm thickness. |
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* Microscope Objectives: 10x, 20x, 50x, 100x, 150x |
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* Acquire Optical Reflection Spectra from 400-900nm |
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* Spectrometer/Detector is capable of detecting down to UV ~190nm, but light source does not support this wavelength. |
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* Reflectivity curve-fitting for thin-film thickness analysis, supporting many common materials (Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub> dielectrics, Si, GaAs, InP semiconductors, metals, photoresists etc.) |
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== Operating Procedures == |
== Operating Procedures == |
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Revision as of 06:13, 11 October 2018
About
The Filmetrics F40-UV is a microscope-mounted thin-film measurement system, allowing you to non-descructively measure thin-film thicknesses in small (patterned) areas on your sample. It is an optical reflectometer, acquiring reflection spectra between 400-900nm optical wavelengths (Vis to Near-IR) with a regular halogen microscope light source. The Filmetrics software then performs curve-fitting to determine the thickness and/or refractive index of the measured films.
Capabilities
- Measure optically transparent thin-films down to ~30nm thickness.
- Microscope Objectives: 10x, 20x, 50x, 100x, 150x
- Acquire Optical Reflection Spectra from 400-900nm
- Spectrometer/Detector is capable of detecting down to UV ~190nm, but light source does not support this wavelength.
- Reflectivity curve-fitting for thin-film thickness analysis, supporting many common materials (Si3N4, SiO2 dielectrics, Si, GaAs, InP semiconductors, metals, photoresists etc.)