Wafer Bonder (Logitech WBS7): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(added crummy scheamtic picture from manual)
(added link to recipes, short About statement.)
Line 9: Line 9:
|manufacturer = Logitech
|manufacturer = Logitech
}}
}}
= About =
== About ==


This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax. This can be used for through-etching of the sample wafer, for dicing, or sometimes for lithography.
==Detailed Specifications==


=Detailed Specifications=


==Operation Procedures==


== Recipes ==
=Operation Procedures=
* Recipes > Packaging Recipes > [https://www.nanotech.ucsb.edu/wiki/index.php/Packaging_Recipes#Wafer_Bonder_.28Logitech_WBS7.29 Wafer Bonder (Logitech WBS7)]

Revision as of 16:14, 16 October 2018

Wafer Bonder (Logitech WBS7)
Tool Type Thermal Processing
Location Bay 5
Supervisor Don Freeborn
Supervisor Phone (805) 893-7975
Supervisor E-Mail dfreeborn@ece.ucsb.edu
Description Wafer Bonder WSB7
Manufacturer Logitech


About

This tool is used for bonding samples to Silicon carrier wafers with CrystalBond wax. This can be used for through-etching of the sample wafer, for dicing, or sometimes for lithography.

Detailed Specifications

Operation Procedures

Recipes