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The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. |
The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. |
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[[User:Silva|Silva]] 10:22, 7 March 2019 (PST) |
[[User:Silva|Silva]] 10:22, 7 March 2019 (PST) |
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===== ICP Panasonic #2 Chamber Clean ===== |
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The system will be down starting Monday morning at 9:30 am for a chamber wet clean. The tool should be ready by 11:30 am the same morning for your use. |
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[[User:Silva|Silva]] 11:50, 7 March 2019 (PST) |
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<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
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Revision as of 17:34, 11 March 2019
Equipment Status
Suss Bonder
Suss fieldservice found several issues with the system. Suss will evaluate the issues and recommend possible solutions. // Silva 21:36, 13 February 2019 (PST)
ASML DUV: PM March 12 to 15th
ASML will be performing their periodic maintenance on the DUV stepper from MONDAY March 11th through WEDNESDAY March 15th. Please schedule your work accordingly. Thibeault 12:57, 8 March 2019 (PST)
GCA 6300 Stepper Maintenance
The GCA 6300 Stepper maintenance is scheduled to start Monday April 1, 2019 at 8:30 am. The service should be finished by Wednesday April 3, 2019 at 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)
GCA Autostep 200 Maintenance
The GCA Autostep 200 maintenance is scheduled to start Monday April 4, 2019 at 8:30 am. The service should be finished the same day by 6:00 pm. Please schedule you process accordingly. Silva 17:56, 5 March 2019 (PST)
IBD Maintenance
The IBD will be down starting Monday March 11, 2019 at 9:00 am for maintenance. This system service will take two to three weeks to complete. Silva 10:22, 7 March 2019 (PST)