Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
(lab open, deleted exhaust shutdown) |
|||
| Line 17: | Line 17: | ||
===== SLR Fluorine ICP Etch ===== |
===== SLR Fluorine ICP Etch ===== |
||
The turbo upgrade has been postponed. I will update you once the new installation date has been established. |
|||
The system will be down May 23 and May 24, 2019 to integrate a new maglev turbo pump. |
|||
[[User:Silva|Silva]] |
[[User:Silva|Silva]] 10:19, 28 May 2019 (PDT) |
||
<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
||
Revision as of 17:19, 28 May 2019
Equipment Status
Lab is OPEN
Campus facilities finished the exhaust fan install sooner than expected. Cleanroom exhaust is up and running and the lab is safe to enter. // John d 09:37, 24 May 2019 (PDT)
Suss Bonder
Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)
SLR Fluorine ICP Etch
The turbo upgrade has been postponed. I will update you once the new installation date has been established. Silva 10:19, 28 May 2019 (PDT)