Template:Announcements: Difference between revisions
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===== SLR Fluorine ICP Etch ===== |
===== SLR Fluorine ICP Etch ===== |
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The turbo upgrade |
The turbo upgrade on the SLR Fluorine ICP Etch will start Wednesday June 19, 2019 and will conclude Thursday afternoon. |
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[[User:Silva|Silva]] |
[[User:Silva|Silva]] 09:40, 17 June 2019 (PDT) |
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===== ASML Stepper #3: Periodic Maintenance ===== |
===== ASML Stepper #3: Periodic Maintenance ===== |
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Revision as of 16:40, 17 June 2019
Equipment Status
Suss Bonder
Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)
SLR Fluorine ICP Etch
The turbo upgrade on the SLR Fluorine ICP Etch will start Wednesday June 19, 2019 and will conclude Thursday afternoon. Silva 09:40, 17 June 2019 (PDT)
ASML Stepper #3: Periodic Maintenance
ASML will be performing their quarterly maintenance on Stepper #3 from Monday June 17th to Friday June 21st. Exact days may vary, we will email updates when we know exactly which days the tool will be closed. // John d 12:55, 28 May 2019 (PDT)