Rapid Thermal Processor (SSI Solaris 150): Difference between revisions
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== Operating Instructions == |
== Operating Instructions == |
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* [[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]] |
* [[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]] |
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* [https://www.nanotech.ucsb.edu/wiki/index.php/File:Solaris_150_install_manual_software3_0_revQ.pdf User manual] |
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Revision as of 16:57, 19 July 2019
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
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About
| To Do: insert basic info |
Detailed Specificiations
| To Do: list of specs, wafer sizes etc. |