Template:Announcements: Difference between revisions
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(ASML down - TCU, minimal info) |
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<!------------- Equipment Status ----------------> |
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Failure of the Temperature Control Unit on the ASML. This unit controls the lens and stage temperatures among other things. Please see emails for updates. |
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===== RIE#5 ===== |
===== RIE#5 ===== |
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RIE#5 will be DOWN Tuesday and Wednesday October 1st and 2nd for a turbo upgrade. We will send out an email Wednesday once the system is up and running. |
RIE#5 will be DOWN Tuesday and Wednesday October 1st and 2nd for a turbo upgrade. We will send out an email Wednesday once the system is up and running. |
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[[User:Silva|Silva]] 15:19, 29 September 2019 (PDT) |
[[User:Silva|Silva]] 15:19, 29 September 2019 (PDT) |
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ASML will be performing quarterly maintenance from Monday Sept. 30th to Friday Oct. 4th, please plan for the tool to be down during this time. |
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Revision as of 20:15, 4 October 2019
Equipment Status
ASML Stepper #3: DOWN
Failure of the Temperature Control Unit on the ASML. This unit controls the lens and stage temperatures among other things. Please see emails for updates. // John d 13:15, 4 October 2019 (PDT)
RIE#5
RIE#5 will be DOWN Tuesday and Wednesday October 1st and 2nd for a turbo upgrade. We will send out an email Wednesday once the system is up and running. Silva 15:19, 29 September 2019 (PDT)
Suss Bonder
Suss Bonder is DOWN. The vendor installed all the hardware but failed to get the software to work. The vendor will be back sometime next week, the week of the 16th, to complete the repair/upgrade. Silva 15:59, 13 September 2019 (PDT)