Automated Coat/Develop System (S-Cubed Flexi): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Newer edit →
Content deleted Content added
VisualWikitext
initial page
 
Added ToolTemplate - tool type and recepe
Line 6: Line 6:
|description = Automatic Coat/Bake/Develop
|description = Automatic Coat/Bake/Develop
|manufacturer = S-Cubed
|manufacturer = S-Cubed
|ToolType = Wet Processing
|recipe = Lithography
|materials =
|materials =
|toolid=
|toolid=

Revision as of 22:31, 8 October 2019

Automated Coat/Develop System (S-Cubed Flexi)
Tool Type Lithography
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Automatic Coat/Bake/Develop
Manufacturer S-Cubed
Lithography Recipes


About

To Be Added

Detailed Specifications

  • Wafer Size:
  • Photoresists/Underlayers Available:
  • Solvents Available:
  • Developers Available:

Process Information

  • TBD

Operating Procedures

  • TBD
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Automated_Coat/Develop_System_(S-Cubed_Flexi)&oldid=156852"