Automated Coat/Develop System (S-Cubed Flexi): Difference between revisions
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|description = Automatic Coat/Bake/Develop |
|description = Automatic Coat/Bake/Develop |
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|manufacturer = S-Cubed |
|manufacturer = S-Cubed |
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|ToolType = Wet Processing |
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|recipe = Lithography |
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|materials = |
|materials = |
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|toolid= |
|toolid= |
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Revision as of 22:31, 8 October 2019
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About
To Be Added
Detailed Specifications
- Wafer Size:
- Photoresists/Underlayers Available:
- Solvents Available:
- Developers Available:
Process Information
- TBD
Operating Procedures
- TBD