Rapid Thermal Processor (SSI Solaris 150): Difference between revisions

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Revision as of 21:49, 25 October 2019

Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.

Rapid Thermal Processor (SSI Solaris 150)

To Do: insert basic info

To Do: list of specs, wafer sizes etc.

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-{{WIP}} <!-- this means "Work In Progress" --->
+{{WIP}} <!-- CLICK HERE: WIP means "Work In Progress" - delete the "WIP" widget when article is ready.-->
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-== About ==
+==About==
 {{todo|insert basic info}}
-== Detailed Specificiations ==
+==Detailed Specificiations==
 {{todo|list of specs, wafer sizes etc.}}
-== Operating Instructions ==
+==Operating Instructions==
-* [[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]]
+*[[SSI Solaris 150 - Operating Procedure|Solaris 150 Operating Procedure]]
-* [https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]
+*[https://www.nanotech.ucsb.edu/wiki/images/6/66/Solaris_150_install_manual_software3_0_revQ.pdf User manual]