Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
(nanofab open, asml down) |
(→ASML is DOWN: light bulb update) |
||
| Line 15: | Line 15: | ||
===== ASML is DOWN ===== |
===== ASML is DOWN ===== |
||
Level sensor failed, suspect it is just a halogen light bulb. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get the procedure from ASML. |
|||
// [[User:John d|John d]] |
// [[User:John d|John d]] 10:01, 30 December 2019 (PST) |
||
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
||
Revision as of 18:01, 30 December 2019
Equipment Status
Nanofab is OPEN
The cleanroom is now open. // John d 08:50, 28 December 2019 (PST)
ASML is DOWN
Level sensor failed, suspect it is just a halogen light bulb. ASML support staff is unavailable until Jan 2nd due to vacations. Will work on it as soon as we get the procedure from ASML. // John d 10:01, 30 December 2019 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)