Template:Announcements: Difference between revisions
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(removed CR=OPEN, ASML update) |
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<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
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===== Nanofab is OPEN ===== |
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The cleanroom is now open. |
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// [[User:John d|John d]] 08:50, 28 December 2019 (PST) |
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===== ASML is DOWN ===== |
===== ASML is DOWN ===== |
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Level sensor failed. |
Level sensor failed. May require hardware replacement for lamp housing, will likely get an ASML technician on site on Monday Jan 6th. |
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// [[User:John d|John d]] |
// [[User:John d|John d]] 12:33, 2 January 2020 (PST) |
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===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
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Revision as of 20:33, 2 January 2020
Equipment Status
ASML is DOWN
Level sensor failed. May require hardware replacement for lamp housing, will likely get an ASML technician on site on Monday Jan 6th. // John d 12:33, 2 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)