Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
(asml update) |
(→ASML is DOWN: Repair Expected Monday: system up) |
||
| Line 10: | Line 10: | ||
<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
||
===== ASML is |
===== ASML is UP ===== |
||
System is up, calibrated and ready for use. |
|||
Parts on order for Level Sensor lamp assembly replacement, will likely get an ASML technician on site on Monday Jan 6th. |
|||
// [[User:John d|John d]] |
// [[User:John d|John d]] 10:00, 9 January 2020 (PST) |
||
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
||
Revision as of 18:00, 9 January 2020
Equipment Status
ASML is UP
System is up, calibrated and ready for use. // John d 10:00, 9 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)
Suss Bonder
Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. Silva 11:16, 25 October 2019 (PDT)