Template:Announcements: Difference between revisions
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The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. |
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. |
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[[User:Silva|Silva]] 15:04, 19 November 2019 (PST) |
[[User:Silva|Silva]] 15:04, 19 November 2019 (PST) |
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===== Suss Bonder ===== |
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Suss Bonder is DOWN. The vendor is struggling to get the software and hardware upgrades to work. We have a meeting next week, 10/28/19, to discuss options. |
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[[User:Silva|Silva]] 11:16, 25 October 2019 (PDT) |
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<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
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Revision as of 01:04, 21 February 2020
Equipment Status
GCA 6000 March Maintenance
The GCA 6300 will be down for maintenance beginning 8:30am Monday March 9, 2020 until 6:30pm March 11, 2020. Silva 10:40, 10 February 2020 (PST)
GCA Autostep 200 March Maintenance
The Autostep 200 will be down for maintenance the morning of March 12, 2020 until late afternoon the same day. Silva 10:40, 10 February 2020 (PST)
ASML Maintenance: March 30th
ASML Stepper #3 periodic maintenance will be on Monday March 30th, system will be down for up to 1.5 weeks. // John d 07:30, 27 January 2020 (PST)
Unaxis ICP-PECVD
The ICP-PECVD module is down for general use. We are conducting experiments with the Deuterated Silane and are not allowing general use of the tool. Silva 15:04, 19 November 2019 (PST)