Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
| Line 27: | Line 27: | ||
===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
||
The ICP-PECVD module is |
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. |
||
[[User: |
//[[User:Thibeault|Thibeault]] 14:22, 26 March 2020 (PDT) |
||
<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
||
Revision as of 21:22, 26 March 2020
Equipment Status
NanoFab Closure: March 17 at 5pm
Following guidelines provided by our Office of Research, we will be closing the UCSB Nanofabrication Facility for regular use, effective Tuesday, March 17 at 5pm. On a limited basis, our Facility can consider access to users to perform “critical activities.”
Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. // John d 11:42, 17 March 2020 (PDT)
ASML Maintenance cancelled
Cancelled until further notice // Thibeault 14:20, 26 March 2020 (PDT)
Unaxis ICP-PECVD
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. //Thibeault 14:22, 26 March 2020 (PDT)