Template:Announcements: Difference between revisions
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Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. Contact the [[Brian Thibeault|Lab Director]] for more information. |
Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. Contact the [[Brian Thibeault|Lab Director]] for more information. |
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// [[User:John d|John d]] |
// [[User:John d|John d]] 17:48, 2 June 2020 (PDT) |
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===== New Tool Installations ===== |
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See the [https://wiki.nanotech.ucsb.edu/w/index.php/Main_Page#mp-trivia-h2 link News Feed] for info on two new tool installations! We have a [https://www.raith.com/products/velion.html?mobile=0 Raith Velion FIB] and a [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150 Maskless Aligner] on the way! |
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===== ASML Maintenance cancelled ===== |
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Cancelled until further notice |
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===== Unaxis ICP-PECVD ===== |
===== Unaxis ICP-PECVD ===== |
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Revision as of 00:48, 3 June 2020
Equipment Status
NanoFab Closure
Following guidelines provided by our Office of Research, we will be closing the UCSB Nanofabrication Facility for regular use, effective Tuesday, March 17 at 5pm.
On a limited basis, our Facility can consider access to users to perform “critical activities.”
Please see email for complete details, titled "Closure of Nanofab to implement University Ramp Down Policy" sent on Tue, Mar 17, 2020 at 9:24 AM PDT. Contact the Lab Director for more information. // John d 17:48, 2 June 2020 (PDT)
New Tool Installations
See the link News Feed for info on two new tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way! // John d 17:48, 2 June 2020 (PDT)
Unaxis ICP-PECVD
The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only. //Thibeault 14:22, 26 March 2020 (PDT)