Direct-Write Lithography Recipes: Difference between revisions
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Photolithography Recipes for the Heidelberg MLA150 will go here. |
Photolithography Recipes for the Heidelberg MLA150 will go here. |
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== Positive Resist (MLA150) == |
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General notes: Hotplates used, filters, laser wavelengths, etc. |
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== Negative Resist (MLA150) == |
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General notes: Hotplates used, filters, laser wavelengths, etc. |
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Revision as of 05:23, 14 September 2020
Back to Lithography Recipes.
 Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
Photolithography Recipes for the Heidelberg MLA150 will go here.
Positive Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.
Negative Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.