Direct-Write Lithography Recipes: Difference between revisions
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m (→Maskless Aligner (Heidelberg MLA150): greyscale) |
(Added PR's we are characterizing) |
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! width="75" |Bake |
! width="75" |Bake |
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! width="75" |Thickness |
! width="75" |Thickness |
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!Laser (nm) |
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! width="125" |Exposure Time |
! width="125" |Exposure Time |
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! width="100" | |
! width="100" |DeFocus |
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! width="75" |PEB |
! width="75" |PEB |
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! width="100" |Developer |
! width="100" |Developer |
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! width="300" |Comments |
! width="300" |Comments |
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|[[:File:AXP4000pb-Datasheet.pdf|AZ4110]] |
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|SPR955CM0.9 |
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|4 krpm/30s |
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|95°C/ |
|95°C/60s |
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|~ |
|~ 1.1 µm |
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|405 |
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|''none'' |
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|AZ400K:DI 1:4 |
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|50s |
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|[[:File:AXP4000pb-Datasheet.pdf|AZ4330]] |
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|4 krpm/30s |
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|95°C/60s |
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|405 |
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|''none'' |
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|AZ400K:DI 1:4 |
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|90s |
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|[[:File:Az p4620 photoresist data package.pdf|AZ4620]] |
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|[[:File:SPR220-Positive-Resist-Datasheet.pdf|SPR 220-3.0]] |
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|2.5 krpm/30s |
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|115°C/90” |
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|~ 2.7 µm |
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|405 |
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|115°C/90s |
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|AZ300MIF |
|AZ300MIF |
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|60s |
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|[[:File:SPR955-Positive-Resist-Datasheet.pdf|SPR 955-CM0.9]] |
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|3 krpm/30s |
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|95°C/60” |
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|~ 0.9 µm |
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|405 |
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|110°C/60s |
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|AZ300MIF |
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|60s |
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| align="left" | |
| align="left" | |
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*?? |
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|[[:File:3600 D, D2v Spin Speed Curve.pdf|THMR-3600HP]] |
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*{{fl|SPR955CMstepperrecipe.pdf|See SPR955CM data file}} |
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=== Negative Resist (MLA150) === |
=== Negative Resist (MLA150) === |
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! width="75" |Bake |
! width="75" |Bake |
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! width="75" |Thickness |
! width="75" |Thickness |
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!Laser (nm) |
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! width="125" |Exposure Time |
! width="125" |Exposure Time |
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! width="100" | |
! width="100" |DeFocus |
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! width="75" |PEB |
! width="75" |PEB |
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! width="75" |Flood |
! width="75" |Flood |
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! width="300" |Comments |
! width="300" |Comments |
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|[[:File:AZ5214-Negative-Resist-Datasheet.pdf|AZ5214]] |
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|AZ5214 |
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|6 krpm/ |
|6 krpm/30s |
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|95°C/ |
|95°C/60s |
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|~ 1.0 |
|~ 1.0 µm |
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|405 |
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|60" |
|60" |
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|AZ300MIF |
|AZ300MIF |
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|60s |
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| align="left" | |
| align="left" | |
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*??? |
*??? |
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|- |
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|AZnLOF2020 |
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|3 krpm/30s |
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|110°C/90s |
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|~ 2.1µm |
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|405 |
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|''none'' |
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|AZ300MIF |
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|60s |
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|[[:File:SU-8-2075-revA.pdf|SU-8 2075]] |
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|~70µm |
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|375 |
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|Extremely viscous. Pour into a wide-mouthed bottle, dispense directly from bottle. Replace napkin at end. |
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! width="300" |Comments |
! width="300" |Comments |
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|AZ4620Z5214 |
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|AZ5214 |
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|?? krpm/30” |
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|95°C/60” |
|95°C/60” |
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|?? µm |
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⚫ | |||
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Revision as of 23:27, 2 October 2020
Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change. |
Maskless Aligner (Heidelberg MLA150)
Photolithography Recipes for the Heidelberg MLA150. Description of litho params- different lasers available, greyscale etc.
Positive Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.
Resist | Spin Cond. | Bake | Thickness | Laser (nm) | Exposure Time | DeFocus | PEB | Developer | Developer Time | Comments |
---|---|---|---|---|---|---|---|---|---|---|
AZ4110 | 4 krpm/30s | 95°C/60s | ~ 1.1 µm | 405 | none | AZ400K:DI 1:4 | 50s | |||
AZ4330 | 4 krpm/30s | 95°C/60s | ~ 3.3 µm | 405 | none | AZ400K:DI 1:4 | 90s | |||
AZ4620 | ||||||||||
SPR 220-3.0 | 2.5 krpm/30s | 115°C/90” | ~ 2.7 µm | 405 | 115°C/90s | AZ300MIF | 60s | |||
SPR 955-CM0.9 | 3 krpm/30s | 95°C/60” | ~ 0.9 µm | 405 | 110°C/60s | AZ300MIF | 60s | |||
THMR-3600HP |
Negative Resist (MLA150)
General notes: Hotplates used, filters, laser wavelengths, etc.
Resist | Spin Cond. | Bake | Thickness | Laser (nm) | Exposure Time | DeFocus | PEB | Flood | Developer | Developer Time | Comments |
---|---|---|---|---|---|---|---|---|---|---|---|
AZ5214 | 6 krpm/30s | 95°C/60s | ~ 1.0 µm | 405 | 60" | AZ300MIF | 60s |
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AZnLOF2020 | 3 krpm/30s | 110°C/90s | ~ 2.1µm | 405 | none | AZ300MIF | 60s | ||||
SU-8 2075 | ~70µm | 375 | Extremely viscous. Pour into a wide-mouthed bottle, dispense directly from bottle. Replace napkin at end. |
Greyscale Lithography
Description...
Resist | Spin Cond. | Bake | Thickness | Exposure Time | Focus Offset | PEB | Flood | Developer | Developer Time | Comments |
---|---|---|---|---|---|---|---|---|---|---|
AZ4620Z5214 | ?? krpm/30” | 95°C/60” | ?? µm | 60" | AZ300MIF | 60" |
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