Template:Announcements: Difference between revisions
Jump to navigation
Jump to search
Mehalana v (talk | contribs) No edit summary |
Mehalana v (talk | contribs) No edit summary |
||
| Line 1: | Line 1: | ||
<startfeed /> |
<startfeed /> |
||
=====Stepper #3 (ASML DUV) - Maintenance April 10th week===== |
|||
ASML engineers will be performing periodic maintenance the week of April 10th. |
|||
Please plan for the system to be down ~10a Monday April 10th, until Friday that week. |
|||
//[[User:Mehalana v|Vraj Mehalana]] 09:17, 4 April 2023 (PDT) |
|||
=====FEI SEM#1 Replacement Project===== |
=====FEI SEM#1 Replacement Project===== |
||
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
||
Revision as of 20:43, 17 April 2023
FEI SEM#1 Replacement Project
The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. //Vraj Mehalana 10:55, 16 March 2023 (PDT)
Unaxis Etch: Down
We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)
Au Plating: UP
only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. // Vraj Mehalana 12:35, 15 March 2023 (PDT)