Template:Announcements: Difference between revisions
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We are still working to source a new Xenon supplier. We'll update you once we know more. |
We are still working to source a new Xenon supplier. We'll update you once we know more. |
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//[[User:Mehalana v|Vraj Mehalana]] 14:51, 9 May 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 14:51, 9 May 2023 (PDT) |
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=====Flip-Chip Bonder, (Finetech) - Update===== |
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Finetech will be on-site Monday late morning or early afternoon to work on our system. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:35, 3 May 2023 (PDT) |
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=====Plasma Activation (EVG 810)===== |
=====Plasma Activation (EVG 810)===== |
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We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. |
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Runs will still require Staff supervision until then. |
Runs will still require Staff supervision until then. |
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//[[User:Mehalana v|Vraj Mehalana]] 18:01, 2 May 2023 (PDT) |
//[[User:Mehalana v|Vraj Mehalana]] 18:01, 2 May 2023 (PDT) |
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=====E-Beam #4 (CHA) - EB4 is down===== |
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We need to replace a part on the source shutter. We should have it on Monday. I'll update when the tool is available. |
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//[[User:Mehalana v|Vraj Mehalana]] 15:26, 28 April 2023 (PDT) |
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=====Wafer Coater (S Cubed Flexi) - S3 field service===== |
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S3 will be on-site looking into our hand 2 issues on Wednesday May 3rd and 4th. They will be confirming Monday so there is a chance those days get shifted. Please plan your processing accordingly as the system will not be available while they are here looking into the problem. |
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//[[User:Mehalana v|Vraj Mehalana]] 13:54, 28 April 2023 (PDT) |
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=====FEI SEM#1 Replacement Project===== |
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The FEI SEM #1 will be removed and replaced starting Friday March 17th. Both SEMs will be shut down and the SEM room will be off limits beginning at 8 am Friday and return to normal operations Tuesday morning the 21st. |
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//[[User:Mehalana v|Vraj Mehalana]] 10:55, 16 March 2023 (PDT) |
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<!--feedBurner name="UCSBNanofab-Announcements" /--> |
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<!-- Description of the RSS feed --> |
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<!-- |
<!-- |
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SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
SEE THE BOTTOM OF THIS PAGE FOR DETAILED INSTRUCTIONS ON ADDING NEWS ITEMS. |
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<!----------------------------------------------> |
<!----------------------------------------------> |
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<!------------- Equipment Status ----------------> |
<!------------- Equipment Status ----------------> |
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===== Unaxis Etch: Down ===== |
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We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony |
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// [[User:John d|John d]] 09:35, 13 February 2023 (PST) |
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===== Au Plating: UP===== |
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only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues. |
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// [[User:Mehalana v|Vraj Mehalana]] 12:35, 15 March 2023 (PDT) |
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<!---------- end of Equipment Status ------------> |
<!---------- end of Equipment Status ------------> |
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Revision as of 18:46, 15 May 2023
IBD Down
We are still working to source a new Xenon supplier. We'll update you once we know more. //Vraj Mehalana 14:51, 9 May 2023 (PDT)
Plasma Activation (EVG 810)
We have received almost all the replacement parts for the tool except the new chuck. The original delivery date of mid June has now been pushed out to early September and they have stated that this is the best that their supplier can do. I will not be installing any new parts on the tool until we have everything. Runs will still require Staff supervision until then. //Vraj Mehalana 18:01, 2 May 2023 (PDT)