Template:Announcements: Difference between revisions
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=====Unaxis ICP-PECVD is DOWN===== |
=====Unaxis ICP-PECVD is DOWN===== |
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Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. |
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RF1 continues to be a problem. I will start the process of elimination from a hardware point of view Monday. Once I resolve the hardware issue our Process group will be exclusively running the system for about a week. During this time we will NOT be allowing anyone else to use the system. Sorry for the inconvenience. |
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Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. |
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Please plan your process accordingly. |
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Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. |
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=====Wafer Bonder, (Suss SB6-8E)===== |
=====Wafer Bonder, (Suss SB6-8E)===== |
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Revision as of 16:55, 11 October 2023
Unaxis ICP-PECVD is DOWN
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. Please plan your process accordingly. Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed. //Vraj Mehalana 09:55, 11 October 2023 (PDT)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update. //Vraj Mehalana 09:59, 20 September 2023 (PDT)
Dicing Saw (ADT) Upgrade 10/9
The dicing saw is scheduled go down for an upgrade on Monday October 9th and will be down for that week and into the weekend. Part of the upgrade will be updated software and will require users to be re-trained. I will provide more info on the re-training once I get a little hands on time with the updated software. ADT will be able to transfer your recipes from the GUI software to the NUI software. Please note that we do sometimes run into an issue with a recipe, as it is not a 100% perfect process, but the vast majority of the recipes do transfer over. If there are any you are concerned about, please make sure you have all parameters documented prior to us upgrading the machine. Documentation of recipes is the user's responsibility, Staff will not be taking care of this. -Lee //Vraj Mehalana 13:25, 3 October 2023 (PDT)
Stepper #1 (GCA 6300) Scheduled Maintenance
The scheduled maintenance activates on 9-28-23 have been cancelled and will be rescheduled at a later date. The tool is now available to be reserved for use on that date. //Vraj Mehalana 10:29, 26 September 2023 (PDT)
Stepper #2 (GCA Autostep 200) - Scheduled Maintenance
The Autostep 200 will be undergoing maintenance and will be unavailable on the following dates and times: (1) 09-30-23 8:00am-5:00pm (2) 10-01-23 8:00am-5:00pm (3) 10-02-23 8:00am-12:00pm Please plan your work activities accordingly. //Vraj Mehalana 13:49, 27 September 2023 (PDT)
EVG is down
We have received the part to repair the tool but we are still consulting with EVG as to who will be preforming the repair work. We hope to have a better handle on this early next week and will update everyone at that time. -Lee //Vraj Mehalana 10:51, 29 September 2023 (PDT)