Dry Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
(RIE5 changed R levels) |
(RIE2 R levels changes) |
||
Line 367: | Line 367: | ||
|- bgcolor="#eeffff" |
|- bgcolor="#eeffff" |
||
! bgcolor="#d0e7ff" align="center" |CdZnTe |
! bgcolor="#d0e7ff" align="center" |CdZnTe |
||
| |
|[[RIE Etching Recipes|R3]] |
||
| |
| |
||
| |
| |
||
Line 447: | Line 447: | ||
|- bgcolor="#ffffff" |
|- bgcolor="#ffffff" |
||
! bgcolor="#d0e7ff" align="center" |InGaAlAs |
! bgcolor="#d0e7ff" align="center" |InGaAlAs |
||
| |
|[[RIE Etching Recipes|R4]] |
||
| |
| |
||
| |
| |
||
Line 463: | Line 463: | ||
|- bgcolor="#eeffff" |
|- bgcolor="#eeffff" |
||
! bgcolor="#d0e7ff" align="center" |InGaAsP |
! bgcolor="#d0e7ff" align="center" |InGaAsP |
||
| |
|[[RIE Etching Recipes|R4]] |
||
| |
| |
||
| |
| |
||
Line 479: | Line 479: | ||
|- bgcolor="#ffffff" |
|- bgcolor="#ffffff" |
||
! bgcolor="#d0e7ff" align="center" |InP |
! bgcolor="#d0e7ff" align="center" |InP |
||
| |
|[[RIE Etching Recipes|R4]] |
||
| |
| |
||
| |
| |
||
Line 495: | Line 495: | ||
|- bgcolor="#eeffff" |
|- bgcolor="#eeffff" |
||
! bgcolor="#d0e7ff" align="center" |ITO |
! bgcolor="#d0e7ff" align="center" |ITO |
||
| |
|[[RIE Etching Recipes|R4]] |
||
| |
| |
||
| |
| |
||
Line 704: | Line 704: | ||
|- bgcolor="#ffffff" |
|- bgcolor="#ffffff" |
||
! bgcolor="#d0e7ff" align="center" |ZnS |
! bgcolor="#d0e7ff" align="center" |ZnS |
||
| |
|[[RIE Etching Recipes|R3]] |
||
| |
| |
||
| |
| |
||
Line 720: | Line 720: | ||
|- bgcolor="#eeffff" |
|- bgcolor="#eeffff" |
||
! bgcolor="#d0e7ff" align="center" |ZnSe |
! bgcolor="#d0e7ff" align="center" |ZnSe |
||
| |
|[[RIE Etching Recipes|R2]] |
||
| |
| |
||
| |
| |
Revision as of 20:41, 9 August 2024
Process Control Data
See above linked page for process control data (dep rate/stress etc. over time), for a selection of often-used dry etches
Dry Etching Tools/Materials Table
The Key/Legend for this table's A...R6
values is at the bottom of the page.
Process Ranking Table
Processes in the table above are ranked by their "Process Maturity Level" as follows:
Process Level | Description of Process Level Ranking | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
A | Process Allowed and materials available but never done | ||||||||||
R1 | Process has been run at least once | ||||||||||
R2 | Process has been run and/or procedure is documented or/and data available | ||||||||||
R3 | Process has been run, procedure is documented, and data is available | ||||||||||
R4 | Process has a documented procedure with regular (≥4x per year) data or lookahead/in-situ control available | ||||||||||
R5 | Process has a documented procedure with regular (≥4x per year) data and lookahead/in-situ control available | ||||||||||
R6 | Process has a documented procedure, regular ( ≥4x per year) data, and control charts & limits available |