Template:Announcements: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(Unaxis UP)
m (moved unaxis to top)
Line 1: Line 1:
<startfeed />
<startfeed />

=====Unaxis ICP-PECVD is UP =====
Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee
// [[User:John_d|Demis D. John]] 15:32, 15 August 2024 (PDT)


=====JEOL JBX-6300FS: Up=====
=====JEOL JBX-6300FS: Up=====
Line 8: Line 12:


// [[User:John_d|Demis D. John]] 15:52, 6 August 2024 (PDT)
// [[User:John_d|Demis D. John]] 15:52, 6 August 2024 (PDT)

=====Unaxis ICP-PECVD is UP =====
Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee
// [[User:John_d|Demis D. John]] 15:32, 15 August 2024 (PDT)


=====ICP1 Down=====
=====ICP1 Down=====

Revision as of 22:32, 15 August 2024

Unaxis ICP-PECVD is UP

Bill removed the broken wafer from the process chamber and cleaned the clamp. We ran a post dep clean with no errors. System is ready to use. --Lee // Demis D. John 15:32, 15 August 2024 (PDT)

JEOL JBX-6300FS: Up

System is up and running reliably.// Demis D. John 09:07, 15 August 2024 (PDT)

Wafer Bonder, (Suss SB6-8E)

A third party bonder repair company will be out here the week of the 26th. The goal is to install the new top heater and then to do a full PM. If all goes well the tool will be available to use late that week. I’ll send out another email once I have more information. Thanks, Aidan.

// Demis D. John 15:52, 6 August 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//Vraj Mehalana 16:59, 14 June 2024 (PDT)