Decomissioned Tools

This is a list of tools that are No Longer Available, but the data may be useful for recipes or other utility and are listed here only for informational purposes.

Tool recipes can often be found linked on the bottom of the tool's page.

These pages are not guaranteed to be kept available and may be removed at any time.

Web Admins - when you move a tool here, please copy/paste the Recipes wikicode into the bottom of the tool page.

Lithography

• E-Beam Lithography System (JEOL JBX-6300FS)
• Nano-Imprint (Nanonex NX2000)
• Stepper 1 (GCA 6300)

Vacuum Deposition

• RIE 3 (MRC)

Dry Etching

• ICP Etch 1 (Panasonic E646V)
• ICP-Etch (Unaxis VLR)
• Silicon Deep Etcher (Plasma-Therm SLR)

Wet Processing

• Critical Point Dryer