RIE Etching Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 7: | Line 7: | ||
=[[RIE 3 (MRC)]] = |
=[[RIE 3 (MRC)]] = |
||
=[[RIE 5 (PlasmaTherm)]] = |
=[[RIE 5 (PlasmaTherm)]] = |
||
==AlGaAs Etching (RIE 5)== |
|||
*[[media:|AlGaAs Etch Recipes]] |
|||
=AlGaAs Etching (RIE 5)== |
=AlGaAs Etching (RIE 5)== |
||
Revision as of 18:25, 2 October 2013
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
RIE 3 (MRC)
RIE 5 (PlasmaTherm)
AlGaAs Etching (RIE 5)
- [[media:|AlGaAs Etch Recipes]]
AlGaAs Etching (RIE 5)=
- [[media:|AlGaAs Etch Recipes]]