Mike Silva: Difference between revisions
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*[[DUV Flood Expose]] |
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*[[Sputter 5 (Lesker AXXIS)]] |
*[[Sputter 5 (Lesker AXXIS)]] |
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*[[PECVD 2 (Advanced Vacuum)]] |
*[[PECVD 2 (Advanced Vacuum)]] |
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*[[ICP Etch 2 (Panasonic E640)]] |
*[[ICP Etch 2 (Panasonic E640)]] |
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*[[Plasma Clean (Gasonics 2000)]] |
*[[Plasma Clean (Gasonics 2000)]] |
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* [[Tube Furnace Wafer Bonding (Thermco)]] |
* [[Tube Furnace Wafer Bonding (Thermco)]] |
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* [[Step Profile (Dektak IIA)]] |
* [[Step Profile (Dektak IIA)]] |
Revision as of 14:43, 10 July 2012
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About
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Current Work
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Tools
Mike Silva is in charge of the following tools: