User contributions for John d

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18:3918:39, 11 May 2022 diff hist +101‎ Services ‎ link to hourly rates Tag: Visual edit
18:3318:33, 11 May 2022 diff hist −34‎ m Template:Announcements ‎ →‎AFM: DOWN: fix link
18:3318:33, 11 May 2022 diff hist +86‎ m Template:Announcements ‎ →‎AFM: DOWN: link to tool
18:3218:32, 11 May 2022 diff hist +124‎ Template:Announcements ‎ AFM down
00:3200:32, 11 May 2022 diff hist +912‎ Process Group - Process Control Data ‎ →‎Etching: links to all etching process control pages Tag: Visual edit
00:2700:27, 11 May 2022 diff hist −27‎ m ICP Etching Recipes ‎ Renaming Process Control Data Tag: Visual edit
00:2500:25, 11 May 2022 diff hist −148‎ m ICP Etching Recipes ‎ renamed "historical data" to "process control" data Tag: Visual edit
00:1800:18, 11 May 2022 diff hist −6‎ m Sputtering Recipes ‎ →‎Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit
00:1800:18, 11 May 2022 diff hist −2‎ Sputtering Recipes ‎ →‎Ion Beam Deposition (Veeco NEXUS): changed style to Page Title Tag: Visual edit
00:1700:17, 11 May 2022 diff hist +3,304‎ N Process Group - Process Control Data ‎ Links to all PECVD and IBD data pages Tag: Visual edit
00:1600:16, 11 May 2022 diff hist +71‎ m Sputtering Recipes ‎ minor updates Tag: Visual edit
00:1500:15, 11 May 2022 diff hist +12‎ Ion Beam Deposition (Veeco NEXUS) ‎ →‎Detailed Specifications: mentioned ITO not installed, minor formatting Tag: Visual edit
00:0600:06, 11 May 2022 diff hist +30‎ Sputtering Recipes ‎ →‎Ion Beam Deposition (Veeco NEXUS): rename process control plots for clarity Tag: Visual edit
00:0100:01, 11 May 2022 diff hist −23‎ PECVD Recipes ‎ renamed Process Control plots for clarity Tag: Visual edit

23:3523:35, 10 May 2022 diff hist +135‎ Nanofab Staff Internal Pages ‎ →‎Process Group: link to Process Control Data Tag: Visual edit
14:2414:24, 10 May 2022 diff hist −108‎ Template:Announcements ‎ F50 up

19:1719:17, 5 May 2022 diff hist +24‎ Test Data of etching SiO2 with CHF3/CF4 ‎ updated temperature reduction comment Tag: Visual edit

21:3221:32, 4 May 2022 diff hist +3‎ PECVD Recipes ‎ →‎Si3N4 [ICP-PECVD]: corrected "current process data" links, previously pointed to "HDSiO" tab Tag: Visual edit
15:4415:44, 4 May 2022 diff hist +354‎ Template:Announcements ‎ F50 down
15:4115:41, 4 May 2022 diff hist −96‎ Template:Announcements ‎ →‎F10-RT Down: fixed links
15:4015:40, 4 May 2022 diff hist +724‎ Template:Announcements ‎ F10-RT down
15:1715:17, 4 May 2022 diff hist +2‎ Oxford ICP Etcher - Process Control Data ‎ modified comment on "brown gunk" observation. Tag: Visual edit
15:1615:16, 4 May 2022 diff hist 0‎ m Oxford ICP Etcher - Process Control Data ‎ →‎Dependence on Sample Size: set table row to header style Tag: Visual edit
15:1315:13, 4 May 2022 diff hist −113‎ Oxford ICP Etcher - Process Control Data ‎ Add row explaining change in mask pattern Tag: Visual edit

23:2123:21, 3 May 2022 diff hist −419‎ Template:Announcements ‎ deleted lasb closure

23:1323:13, 2 May 2022 diff hist +291‎ S-Cubed Flexi - Operating Procedure ‎ link to DSK bake vs dev rate, recipe minor updates Tag: Visual edit
23:0523:05, 2 May 2022 diff hist +2,188‎ S-Cubed Flexi - Operating Procedure ‎ inital procedure, and initial recipes Tag: Visual edit

18:1418:14, 29 April 2022 diff hist +161‎ Oxford ICP Etcher - Process Control Data ‎ bolded the title row Tag: Visual edit

21:2721:27, 28 April 2022 diff hist +45‎ Unaxis VLR Etch - Process Control Data ‎ comments on undercut profile from 3/29/22 Tag: Visual edit
00:4800:48, 28 April 2022 diff hist +355‎ Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer ‎ mentioned switching Imaging PR Tag: Visual edit
00:4500:45, 28 April 2022 diff hist +23‎ m Lithography Recipes ‎ →‎Lift-Off Recipes Tag: Visual edit
00:3900:39, 28 April 2022 diff hist +10‎ m Lithography Recipes ‎ →‎Lift-Off Recipes Tag: Visual edit
00:3500:35, 28 April 2022 diff hist +4,054‎ Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer ‎ wrote initial process Tag: Visual edit

23:3423:34, 27 April 2022 diff hist +891‎ N Lift-Off with I-Line Imaging Resist + LOL2000 Underlayer ‎ added Tips, copied from DUV Liftoff page Tag: Visual edit
23:3223:32, 27 April 2022 diff hist +142‎ Lift-Off with DUV Imaging + PMGI Underlayer ‎ corrected typo Tag: Visual edit
23:2923:29, 27 April 2022 diff hist −23‎ Lift-Off with DUV Imaging + PMGI Underlayer ‎ →‎Tips: fixed link to liftoff tutorial Tag: Visual edit
23:2523:25, 27 April 2022 diff hist +633‎ Lithography Recipes ‎ →‎Lift-Off Recipes: link to I-Line Liftoff w/ LOL underlayer Tag: Visual edit
01:4901:49, 27 April 2022 diff hist +72‎ Template:Announcements ‎ updated lab closure msg

22:5122:51, 26 April 2022 diff hist +200‎ Unaxis VLR Etch - Process Control Data ‎ →‎Data - InP Ridge Etch (Unaxis VLR): updated chamber conditioning Tag: Visual edit

19:0319:03, 25 April 2022 diff hist +339‎ Microscopes ‎ added AmScope camera model #, minor changes to liknj to Amscope section Tag: Visual edit

02:0202:02, 21 April 2022 diff hist +49‎ Tool List ‎ →‎Dry Etch: added Raith Velion to Dry Etch > Ion Milling section Tag: Visual edit

06:3106:31, 20 April 2022 diff hist +200‎ Dry Etching Recipes ‎ added Nb, Os rows, "A" for Pan1/2 Tag: Visual edit
06:1406:14, 20 April 2022 diff hist +174‎ Thermal Processing Recipes ‎ →‎Bonding with Intermediate layer: link to Logitech recipes page Tag: Visual edit

18:5418:54, 19 April 2022 diff hist −36‎ m Template:Announcements ‎ →‎LEXT Confocal: DOWN: fix link
18:5318:53, 19 April 2022 diff hist +154‎ Template:Announcements ‎ →‎LEXT Confocal: DOWN: linked to DX-1000
18:5118:51, 19 April 2022 diff hist +117‎ Template:Announcements ‎ updated floor cleaning closure

20:0920:09, 15 April 2022 diff hist −799‎ Unaxis VLR Etch - Process Control Data ‎ added WorkInProgress, example table rows Tag: Visual edit
20:0820:08, 15 April 2022 diff hist +1,403‎ N Unaxis VLR Etch - Process Control Data ‎ pasted table from Oxford ICP Tag: Visual edit: Switched
20:0620:06, 15 April 2022 diff hist +9‎ ICP Etching Recipes ‎ →‎ICP-Etch (Unaxis VLR): link to Process Control Data Tag: Visual edit
20:0220:02, 15 April 2022 diff hist +233‎ ICP Etching Recipes ‎ added Process Control Data sections for each tool Tag: Visual edit

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