Oxygen Plasma System Recipes

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Back to Dry Etching Recipes.

Ashers (Technics PEII)

Plasma Clean (Gasonics 2000)

UV Ozone Reactor

Plasma Activation (EVG 810)

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Oxygen_Plasma_System_Recipes&oldid=1986"

Recipes