Template:Announcements

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UCSB NanoFab Announcements

Announcements

There are no general announcements at this time. // Posted: 09:58, 4 January 2018 (PST)

Gasonics Up

The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to repaired and returned. // Posted: 10:14, 12 February 2018 (PST)

ASML Up

ASML Stepper #3 periodic maintenance is complete. System is ready for use. // Posted: 18:52, 10 February 2018 (PST)

JEOL SEM #2

Problem with load lock gate valve. Currently down. The service engineer from JEOL thinks he has fixed the gate valve issue. Letting the system stabilize overnight and then run a couple of tests in the morning. If all goes well the system should be ready to use by late morning tomorrow. // Posted: 16:51, 12 February 2018 (PST)

Cary 500

UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)

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