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UCSB NanoFab Announcements
Announcements
There are no general announcements at this time. // Posted: 09:58, 4 January 2018 (PST)
Gasonics Up
The process chamber mechanical pump is struggling to make base pressure but the system is able to successfully run. We are waiting for the replacement pump to repaired and returned. // Posted: 10:14, 12 February 2018 (PST)
ASML Up
ASML Stepper #3 periodic maintenance is complete. System is ready for use. // Posted: 18:52, 10 February 2018 (PST)
JEOL SEM #2: Up
System is up, gate valve fixed. // John d (talk) 16:01, 13 February 2018 (PST)
Cary 500 Down
UV-Vis Detector Failure. Tool is able to used from 600nm and up. Looking into replacement options. // Posted: 13:47, 12 February 2018 (PST)