Template:Announcements
UCSB NanoFab Announcements
Gasonics Up
RIE#5: Software Upgrades
RIE#5 System has a leak - down until further notice. All users will need to be retrained to use the new Cortex software. // Thibeault 16:40, 26 September 2018 (PDT)
PECVD#1: Software Upgrade
Software upgrade in progress. After the upgrade is complete, everyone must be re-certified to use the tool. Please document any custom recipes that you may have, in case they can't be copied over. // Thibeault 16:40, 26 September 2018 (PDT)
CARY500 - Down - Decomissioned
CARY 500 Spectrophotometer has failed - Will not be repaired - being decomissioned. New Filmetrics F10-RT-UVX being ordered as a replacement. // Thibeault 16:40, 26 September 2018 (PDT)
RIE#5: SiCl4 Issue
We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)