Template:Announcements

UCSB NanoFab Announcements

RIE#5: Software Upgrades

RIE#5 system has undergone a software upgrade. All users will need to be retrained to use the new Cortex software. // John d 14:39, 16 October 2018 (PDT)

PECVD#1: Software Upgrade

Software upgrade completed, everyone must be re-certified to use the tool. All old recipe files have been backed up but not reinstated - let us know if you need your old recipe parameters. // John d 14:39, 16 October 2018 (PDT)

CARY500 - Down - Decomissioned

CARY 500 Spectrophotometer has failed - Will not be repaired - being decomissioned. New Filmetrics F10-RT-UVX being ordered as a replacement. // Thibeault 16:40, 26 September 2018 (PDT)

RIE#5: SiCl4 Issue

We have a flow rate problem on the SiCl4 gas line. You can only flow the SiCl4 for 5 minutes and then you have to wait 5 minutes before you flow it again. So in order to to do a 10 minute Etch you will have to do it in three steps flow 5 mi, wait 5mi, then flow 5min. // John d 17:22, 15 June 2018 (PDT)