Template:Announcements

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Revision as of 13:51, 19 August 2020 by John d (talk | contribs) (addd lab shutdown, remove ASML)
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Equipment Status


Lab Shutdown: Sat. Aug. 22nd morning

The cleanroom will be closed for the morning shift this Saturday to allow for FM to run some tests on our emergency generator. The lab will open back up at 1:15pm. We will have to shutdown and start up the majority of the tools so any piece of equipment with a cryo pump (ebeam #1, #2, #4, etc) will be down until late in the afternoon. Staff will send out updates on the systems that will need time to recover. Please plan accordingly. // Hopkins a 06:00, 19 August 2020 (PDT)

NanoFab COVID Response

Following guidelines provided by our Office of Research, the UCSB Nanofabrication Facility is open only for limited/authorized use for critical activity at this time.

Contact the Lab Director for more information.

// John d 15:00, 19 July 2020 (PDT)

New Tool Installations

See the News Feed for info on two upcoming tool installations! We have a Raith Velion FIB and a Heidelberg MLA150 Maskless Aligner on the way.

// John d 17:48, 2 June 2020 (PDT)

Unaxis ICP-PECVD

The ICP-PECVD module is available upon request. Contact Tony Bosch if interested. System is using deuterated Silane for low loss optical films use only.

// Thibeault 14:22, 26 March 2020 (PDT)