Direct-Write Lithography Recipes

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Back to Lithography Recipes.


Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Photolithography Recipes for the Heidelberg MLA150 will go here.

Positive Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.

Negative Resist (MLA150)

General notes: Hotplates used, filters, laser wavelengths, etc.

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