Template:Announcements

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Revision as of 19:35, 15 March 2023 by Mehalana v (talk | contribs)
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Important Announcements


E-Beam #5: Down

Chuck rotation motor damaged. // Vraj Mehalana 14:38, 13 March 2023 (PDT)

ICP #1: Down

One of the dry pumps is not getting power from the tool. We have located part of the problem but need to contact Panasonic for some guidance. Since tech support is in Japan, response time will be impacted. -- Lee Sawyer // Vraj Mehalana 12:36, 13 March 2023 (PDT)

Unaxis Etch: Down

We had to take the VAT controller off of this module to get the ICP-PECVD running. I have no immediate ETA for this system coming back online. Until we get this system running again you will need to use the Oxford Cobra system. -- Tony // John d 09:35, 13 February 2023 (PST)

Dektak XT ready for training

We have replaced the Dektak 6M with a new Dektak XT profilometer. The system is available for training, please contact the tool supervisor. // John d 10:08, 7 February 2023 (PST)

Au Plating: UP

only the full 100mm wafer fixture is available at the moment. You can plate smaller pieces on it with no issues though contact the tool supervisor. // Vraj Mehalana 12:35, 15 March 2023 (PDT)

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