Template:Announcements
ProbeStation scheduled IT maintenance
The ProbeStation will be undergoing IT maintenance and will be unavailable on the following dates :
- 10-30-23
- 10-31-23
Please plan your work activities accordingly. //Vraj Mehalana 11:58, 17 October 2023 (PDT)
PECVD2 is UP
Initially it was planned to remove the hoist again to rebuild it to solve the leak.
The manufacturer is sending out a rebuild kit under warranty since it is a brand new hoist that is leaking. When that arrives I will schedule another all day event to rebuild the hoist.
I cleaned up the leaked oil, checked oil level, and did an inspection of the tool. System is back up and available for use. //Vraj Mehalana 11:11, 23 October 2023 (PDT)
Unaxis ICP-PECVD is UP for Non-GapFill
Tool is up for NON-GapFill (450W RF Bias) Recipes. Other Std SiO2/SiN deps are available. Next Week Monday Oct 16th to Wed 18th we will allow GapFill (450W RF Bias) recipes to be run. Please plan your process accordingly. Also we are still testing our own GapFill recipe that hopefully reduces flakes. Once this is ready you’ll want to qualify our new recipe to make sure it works for your application, as the old GapFill recipe will eventually be deprecated & disallowed.
//Vraj Mehalana 09:55, 11 October 2023 (PDT)
Wafer Bonder, (Suss SB6-8E)
The top heater has failed. We are currently in the process of trying to source a new heater. we will send out an email once I have an update.
//Vraj Mehalana 09:59, 20 September 2023 (PDT)
Dicing Saw Upgrade - Update
The upgrade work on the saw is completed. My plan is to work on updating the SOP and running some more tests tomorrow and Monday. If all goes smoothly I should be ready to start re-training users on Tuesday, so I should be sending out an email some time Monday in regard to the re-training schedule.
-Lee
//Vraj Mehalana 13:25, 3 October 2023 (PDT)
EVG is down
EVG finally has our PO. They are scheduled to be here next week, my guess would be Tuesday.
-Lee
//Vraj Mehalana 10:37, 18 October 2023 (PDT)