E-Beam Evaporation Recipes
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E-Beam 1 (Sharon)
Materials Table (E-Beam #1)
Materials Table
| |||||||
---|---|---|---|---|---|---|---|
Material | Position | Hearth / Crucible | Film Number | Density | Z Ratio | Tooling | Comments |
Ag | 4 | C | 5 | 10.5 | 0.524 | 140 | Brian, could you please check this table? Z ratio should be 0.529 |
Al | 2 | C | 6 | 2.7 | 1.080 | 118 | |
Al2O3 | 1 | C | 6 | 3.97 | 0.50 | 169 | Z-ratio should be 0.336 |
Au | 4 | C | 4 | 19.3 | 0.381 | 138 | Bazookas can be used at 20-30Å/sec. |
AuGe | 3 | C | 5 | 17.63 | 0.397 | 151 | Composition unpredictable unless you practically empty the crucible. |
Cr | 3 | H | 6 | 7.2 | 0.305 | 140 | Do not evaporate more than 200Å of Cr in the E-Beam evaporator. |
Fe | 7.86 | 0.349 | |||||
Ge | 3 | C | 6 | 5.35 | 0.516 | 130 | |
MgO | 1 | 6 | 3.58 | 0.411 | |||
Mo | 10.2 | 0.257 | |||||
Ni | 1 | H | 1 | 8.91 | 0.331 | 140 | Prone to spitting. Cool down for 15 minutes before venting. |
NiCr | 1 | H | 6 | 8.23 | 0.321 | Density 8.52, z ratio 0.3258 | |
Nb | 4 | C | 6 | 8.57 | 0.516 ( should be 0.492) | Cool down for at least 35 minutes before venting. | |
Pd | 1 | H | 9 | 12.0 | 0.357 | 140 | |
Pt | 1 | C | 8 | 21.40 | 0.245 | 140 | Prone to spitting. Evaporate at 1.5Å/sec or less. |
Si | 2 | H | 2 | 2.32 | 0.712 | 150 | Cool down very slowly after evaporating lest you crack the source. |
SiO | C | 6 | 2.13 | 0.87 | 132 | ||
SiO2 | 1 | C | 6 | 2.2 ( should be 2.648) | 1.07 ( should be 1.000) | 140 | Please change the crystal and the upper mirror after evaporating oxide. |
SrF2 | 1 | C | 6 | 4.28 | 0.727 | 140 | |
Ta | 1 | H | 6 | 16.6 | 0.262 | Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta. | |
W | 1 | C | 6 | 19.3 | 0.163 | 138 | |
Ti | 3 | H | 3 | 4.50 | 0.628 | 139 |