Template:LithRecipe Table
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| width="100" bgcolor="#DAF1FF" | SUSS MJB-3
| width="100" bgcolor="#DAF1FF" | SUSS MA-6
| width="100" bgcolor="#DAF1FF" | Stepper 1
(GCA 6300)
| width="100" bgcolor="#DAF1FF" | Stepper 2
(AutoStep 200)
| width="100" bgcolor="#DAF1FF" | Stepper 3
(ASML DUV)