ICP Etching Recipes

Back to Dry Etching Recipes.

ICP Etch 1 (Panasonic E626I)

SiO₂ Vertical Etch (Panasonic 1)

• SiO₂ Vertical Etch Recipe
• SiO₂ CHF3 Etch Variations

SiO₂ Pure CHF3 Etch Recipe Variations (Panasonic 1)

• [[media:==SiO₂ Vertical Etch (Panasonic 1)|SiO₂ Vertical Etch Recipe]]

Cr Etch (Panasonic 1)

• Cr Etch Recipes

ICP Etch 2 (Panasonic E640)

SiOx Vertical Etch (Panasonic 2)

• SiOx Vertical Etch Recipe

ICP-Etch (Unaxis VLR)

InP Etch (Unaxis VLR)

InP Etch

• InP Etch Recipe (200C)

InP Etch (H₂ Ar)

• InP Etch Recipe (H₂ Ar 200C)