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Recipe
- Recipe Name
- SiOVert_MadeUp
- Description
- This recipe is made up, and deposits glass with lots of holes in it.
- Recipe Parameters
- Ar = 20 sccm
- O2 = 10 sccm
- Pressure = 50 mT
- RF = 200 W
- Temperature = 200°C
- Dep Rate
- 200 nm/min or 12,000 nm/sec
- Notes
- Make sure sample is inside out before loading into tool.
- This recipe usually doesn't work.
- Film will etch in HF
Characterization
