UV Ozone Reactor

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UV Ozone Reactor

Tool Type	Dry Etch
Location	Bay 5
Supervisor	Tony Bosch
Supervisor Phone	(805) 893-3486
Supervisor E-Mail	bosch@ece.ucsb.edu

Description	?
Manufacturer	?
Dry Etch Recipes

About

Operating Procedures

Quick Start
[Media:UV Ozone Manual Jelight M-144AX.pdf]

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