Thermal Evap 2 (Solder)

Thermal Evap 2 (Solder) Tool Type Vacuum Deposition Location Bay 3 Supervisor Don Freeborn Supervisor Phone (805) 893-7975 Supervisor E-Mail dfreeborn@ece.ucsb.edu Description ? Manufacturer Custom Vacuum Deposition Recipes Sign up for this tool

About

Thermal evaporator #2 is the designated "Solder" evaporator. The tool is used primarily for solder materials including Gold, Indium and Tin.

Use this tool for materials with low melting temperatures, or for materials that have a high risk of contamination in the e-beam evaporators.

Detailed Specifications

Wafers up to 12" can be mounted.

Documentation

• Operating Instructions

Recipes

• Recipes > Thermal Evaporation Recipes > Thermal Evaporator 2
  • Visit this page for the materials tables and evaporation parameters.