Oven 4 (Thermo-Fisher HeraTherm)

Oven 4 (Thermo-Fisher HeraTherm) Tool Type Lithography Location Bay 6 Supervisor Brian Lingg Supervisor Phone (805) 893-8145 Supervisor E-Mail lingg_b@ucsb.edu Description Programmable Oven Manufacturer Thermo Scientific Model HeraTherm Sign up for this tool

About

This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.

Specifications

• Maximum Temperature = 330 C (no active cooling)
• Gases: N2, manually set with needle valve (not programmable)
• Multi-step programmable temperature ramps
• Programmable atmospheric purge (for cooling)

Documentation

To Do: User Manual