E-Beam 5 (Plasys)
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About
The Plasys is a single-wafer load evaporator with programmable wafer angle, wafer rotation, ion-mill pre-cleaning and oxygen flow capabilities, in situ while keeping the wafer under vaccuum.
Only Aluminum is currently installed.
The system is currently dedicated only to specific use-cases such as superconducting aluminum evap.
Materials and Recipes allowed are tightly controlled. Please contact the supervisor to find out if your application is allowed on this machine.
Detailed Specifications
- To Be Added
Documentation
Recipes
- To Be Added