Template:Announcements

Stepper #3 (ASML DUV) - System UP and calibrated

We have finished calibrations, System is up.

Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose.

//Vraj Mehalana 11:17, 24 May 2024 (PDT)

Atomic Force Microscope (Dimension ICON) - 05/17: System UP

Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder!

//Vraj Mehalana 13:46, 20 May 2024 (PDT)

MA6 TSA is down - Update

We have received the replacement motor for the TSA Y axis. The FSE will be onsite Monday June 3rd to work on the tool.

The tool remains up for backside alignment and topside exposures that do not require alignment.

-Lee //15:59, 22 May 2024 (PDT)

Velion FIB Tool DOWN

Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice.

//Vraj Mehalana 10:58, 30 April 2024 (PDT)

ICP1 Down

The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)

Lab Access Changes: Symmetry App

The iris scanner has been decommissioned. Please use the card reader which supports:

-Physical card

-Mobile phone via Symmetry App

//10:54, 23 May 2024 (PDT)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)