RIE Etching Recipes

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Back to Dry Etching Recipes.

RIE 1 (Custom)

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

CdZnTe Etch Recipes

RIE 3 (MRC)

RIE 5 (PlasmaTherm)

GaN Etching (RIE 5)

GaN Etch Recipes

Si Deep RIE (PlasmaTherm/Bosch Etch)

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Recipes