RIE Etching Recipes

Back to Dry Etching Recipes.

RIE 2 (MRC)

CdZnTe Etching (RIE 2)

• CdZnTe Etch Recipes

RIE 5 (PlasmaTherm)

AlGaAs Etching (RIE 5)

• AlGaAs Etch Recipes

GaN Etching (RIE 5)

• GaN Etch Recipes