User contributions for Zwarburg

28 June 2012

• 04:1704:17, 28 June 2012 diff hist 0 N File:DUV-Spectra-No-Filter.png No edit summary current
• 04:1504:15, 28 June 2012 diff hist +13 N File:DUV.jpg {{toolimage}} current
• 04:1504:15, 28 June 2012 diff hist +1,085 N DUV Flood Expose Created page with "{{tool|{{PAGENAME}} |picture=DUV.jpg |type = Lithography |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 6 |email=silva@ece.ucsb.edu |description = Deep UV Flood Expose…"
• 04:0804:08, 28 June 2012 diff hist 0 Stepper 1 (GCA 6300) No edit summary
• 04:0604:06, 28 June 2012 diff hist −1 Stepper 2 (AutoStep 200) No edit summary
• 04:0504:05, 28 June 2012 diff hist +11 N Category:Manuals Created page with "All Manuals" current
• 04:0504:05, 28 June 2012 diff hist +10 N File:GCA-200-Training-Manual.pdf {{manual}} current
• 04:0404:04, 28 June 2012 diff hist +2,671 N Stepper 2 (AutoStep 200) Created page with "{{tool|{{PAGENAME}} |picture=Stepper1.jpg |type = Lithography |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = GCA 6…"
• 03:5803:58, 28 June 2012 diff hist +29 N Template:Manual Redirected page to Template:Manuals current
• 03:5703:57, 28 June 2012 diff hist +47 N Template:Manuals Created page with "<includeonly>Category:Manuals</includeonly>" current
• 03:5703:57, 28 June 2012 diff hist +11 N File:GCA-6300-Training-Manual.pdf {{manuals}} current
• 03:5503:55, 28 June 2012 diff hist +2,603 N Stepper 1 (GCA 6300) Created page with "{{tool|{{PAGENAME}} |picture=Stepper1.jpg |type = Lithography |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = GCA 6…"
• 01:5001:50, 28 June 2012 diff hist +7 Template:Nav No edit summary
• 01:4901:49, 28 June 2012 diff hist +1 N Sputter 5 Created page with "f" current
• 01:4901:49, 28 June 2012 diff hist +1 Template:Nav No edit summary
• 01:0301:03, 28 June 2012 diff hist +10 Category:Dry Etch Redirected page to Tool List#Dry Etch current
• 01:0201:02, 28 June 2012 diff hist +10 Category:Vacuum Deposition Redirected page to Tool List#Vacuum Deposition current
• 01:0201:02, 28 June 2012 diff hist +10 Category:Lithography Redirected page to Tool List#Lithography current
• 01:0101:01, 28 June 2012 diff hist −538 Inspection, Test and Characterization Redirected page to Tool List#Inspection, Test and Characterization current
• 01:0101:01, 28 June 2012 diff hist −140 Packaging Redirected page to Tool List#Packaging current
• 01:0101:01, 28 June 2012 diff hist −164 Thermal Processing Redirected page to Tool List#Thermal Processing current
• 01:0001:00, 28 June 2012 diff hist −168 Wet Processing Redirected page to Tool List#Wet Processing current
• 01:0001:00, 28 June 2012 diff hist −296 Dry Etch Redirected page to Tool List#Dry Etch current
• 01:0001:00, 28 June 2012 diff hist −399 Vacuum Deposition Redirected page to Tool List#Vacuum Deposition current
• 01:0001:00, 28 June 2012 diff hist −231 Lithography Redirected page to Tool List#Lithography current
• 00:5900:59, 28 June 2012 diff hist +22 N Category:Dry Etch Redirected page to Dry Etch
• 00:5800:58, 28 June 2012 diff hist +34 RIE 1 (Custom) No edit summary
• 00:5700:57, 28 June 2012 diff hist +1,517 N RIE 1 (Custom) Created page with "{{tool|{{PAGENAME}} |picture=e-beam2.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 3 |email=freeborn@ece.ucsb.edu |description = Custom, Loadlo…"
• 00:5300:53, 28 June 2012 diff hist +25 N Category:Lithography Redirected page to Lithography
• 00:5200:52, 28 June 2012 diff hist −6 Stepper 3 (ASML DUV) No edit summary
• 00:4500:45, 28 June 2012 diff hist +13 N File:ASML.jpg {{toolimage}} current
• 00:4500:45, 28 June 2012 diff hist 0 Template:Tool No edit summary
• 00:4300:43, 28 June 2012 diff hist +739 N Stepper 3 (ASML DUV) Created page with "{{tool|{{PAGENAME}} |picture=ASML.jpg |type = Vacuum Deposition |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = ASM…"
• 00:4000:40, 28 June 2012 diff hist +7 Tool List →Lithography

27 June 2012

• 22:4822:48, 27 June 2012 diff hist +13 N File:E-beam4.jpg {{toolimage}}
• 22:4822:48, 27 June 2012 diff hist 0 E-Beam 4 (CHA) No edit summary
• 22:4822:48, 27 June 2012 diff hist +1,851 N E-Beam 4 (CHA) Created page with "{{tool|{{PAGENAME}} |picture=e-beam3.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Multi-Wafe…"
• 22:4622:46, 27 June 2012 diff hist −1 E-Beam 3 (Temescal) No edit summary
• 22:4522:45, 27 June 2012 diff hist +1,734 E-Beam 3 (Temescal) No edit summary
• 22:4322:43, 27 June 2012 diff hist +13 N File:E-beam3.jpg {{toolimage}}
• 22:4222:42, 27 June 2012 diff hist +26 Template:Tool No edit summary
• 22:4022:40, 27 June 2012 diff hist −106 E-Beam 2 (Custom) No edit summary
• 22:3922:39, 27 June 2012 diff hist +490 E-Beam 2 (Custom) No edit summary
• 22:3822:38, 27 June 2012 diff hist −32 E-Beam 1 (Sharon) →Detailed Specifications
• 22:3722:37, 27 June 2012 diff hist +1,165 N E-Beam 2 (Custom) Created page with "{{tool|{{PAGENAME}} |picture=e-beam2.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Electron-B…"
• 22:3722:37, 27 June 2012 diff hist +80 E-Beam 1 (Sharon) Undo revision 155 by Zwarburg (Talk)
• 22:3622:36, 27 June 2012 diff hist +87 E-Beam 1 (Sharon) →About
• 22:3422:34, 27 June 2012 diff hist −11 File:E-beam1.jpg No edit summary
• 22:3422:34, 27 June 2012 diff hist +51 N Template:Toolimage Created page with "<includeonly>Category:Tool Images</includeonly>" current
• 22:3422:34, 27 June 2012 diff hist +13 N File:E-beam2.jpg {{toolimage}} current